Video Contact Angle System - VCA 3000s
VCA 3000s
Video Contact Angle System
VCA 3000S Wafer Surface Analysis Systems are specially designed for use in semiconductor wafer processing quality control. The system provides quick and accurate contact angle/surface energy analysis on wafer surface to evaluate adhesion, cleanliness and coatings.The syringe mechanism can be raised for easy loading and unloading eliminating the possibility of wafer damage.
Although the system was designed for wafer surface analysis it is also a useful tool for any application that requires a large stage. Samples sizes up to W12” x L12” x H.75” can easily be accommodated by this system.
The VCA 3000S utilizes a precision camera and advanced PC technology to capture static or dynamic images of the droplet and determine tangent lines for the basis of contact angle measurement. Manual or automatic syringe provides easy dispensing of test liquid. Computerized operation eliminates human error in line drawing and captures dynamic images for time sensitive analysis. Data and images are stored in the computer for later analysis or easy transfer to other software applications.
vca APPLICATIONS
Coating assessment of the HMDS process
Surface contamination detection
Adhesive and primer preparation
Coating uniformity
Coating quality
Surface cleanliness
VCA 3000S Features:
Hardware Features
High-resolution video camera with magnifying lens with high intensity LED lighting for precise image capture
300mm rotating stage, allows access to all areas of wafer
High-end PC is standard with high-performance video board for advanced image analysis and video capture
Flat Screen Monitor
Software Features
Automatic contact angle imaging and calculation
Dynamic droplet capture (movie viewing of droplets)
Surface energy (dynes/cm) analysis
SPC (Statistical Process Control)
Pendant Drop surface analysis
Syringe Assembly
Vertical Orientation
Straight Needle
Motorized Drive Mechanism
1.8 Degree Stepping Motor
Syringe Head: Tilt back for safe and easy removal of large samples
Sample Platform
Platform size and shape 12” Circular
Sample size and shape 4”, 6”, 8”, 12” Circular
Not wider than 12”
Movement along the optical axis 6” by hand sliding with lock
Movement transverse to the optical axis 6” by dial
Vertical traveling distance 2” by dial
Rotating 360 degrees by hand with Planary Bearing
Software
Contact angle calculations and control AutoFAST
Time-based contact angle analysis Dynamic-2500
Surface energy calculations SE-2500
Statistical process control SPC
Pendant drop for surface tension PDAST
Dimensions
Overall length 32”
Min width 12”
Max width 18.5”
Max height 16.5”
Net weight of platform 47 lb